Aluminum nitride is a versatile material most commonly used where high thermal conductivity and electrical insulation are required. This unique ability, combined with its low toxicity, makes AIN ideal for rapidly heating and dissipating heat from other components and systems. We supply aluminum nitride heaters.

The AlN Heater is designed for thermal applications that require a high-performance ceramic heater to ensure optimal results for the equipment or process. AlN is particularly suited to applications that require clean, contaminant-free sources. Aluminum nitride ceramic heaters can provide temperatures up to 500°C with an ultra-fast ramp rate of 150°C, depending on the application, design, and process parameters. In addition to superior thermal conductivity, aluminum nitride ceramic heaters have high galvanic isolation properties and typically achieve excellent chemical resistance compared to conventional metal heaters.

Aluminum Nitride Ceramic Parameter

Item

Unit

Value

Color

–

Grayish white, Beige

Water absorption

%

0

Volume Density

g/cm3

≥3.30

Surface roughness

um

0.2-0.85

Warpage

(length ‰)

≤2.5‰

Thermal conductivity

W/m.k

≥170

Thermal expansivity

x 10-6/°C (20℃-800℃)

4-6

Flexural strength

MPa

≥350

Modulus of elasticity

GPa

310-320

Dielectric constant

1MHZ, 25℃

8.9

Dielectric loss

x 10-4

4.6

Dielectric strength

KV/mm

≥15

Volume resistivity

Ω.cm

≥1014

Typical characteristic

-Very high thermal conductivity, Ultra-high thermal conductivity ≥225W/m·k

-High insulation capacity

-Low dielectric constant, effective against electronic signal interference

-Low thermal expansion

-Good metallization capacity

-Expansion coefficient can be matched with semiconductor silicon wafer

-Better mechanical strength than alumina

-Good corrosion resistance to molten metal

-Minimum impurity content, non-toxic, high purity

Application of Aluminum Nitride Ceramics

-Heater wafers used in processing chambers

-Optoelectronic communication devices

-LED industry

-Automotive electronic function modules

-High-power module

-High-frequency microwave application devices

-Electrical and electronic components

Packing

Our Aluminum Nitride Heater is carefully handled to prevent damage during storage and transportation and to preserve the quality of our product in its original condition.