PG (Pyrolytic Graphite) and PBN (Pyrolytic Boron Nitride) combine through the process of high temperature CVD (Chemical Vapor Deposition) manufacturing to form a ceramic heating element capable of incredibly high thermal performance and stability. An element path is machined into the PG layer to produce the element track and power connections prior to coating with PBN to insulate the PG Layer. Areas of exposed PG are left surrounding through holes for power connections which are typically located outside of the desired hot zone to give a better thermal uniformity or for compact areas can be located within the hot zone. Suitable for use in UHV, High Vacuum up to 1200°C and in air up to 300°C (exposed graphite pads will oxidize above this). PBN will start to oxidize at 800°C. Edgetech provides customized PBN/PG Heaters.

PBN/PG Elements have a wide range of applications. PBN products are well suited for use in Molecular Beam Epitaxy, Metal Organic Chemical Vapour Deposition (MOCVD), Crystal Growth and many other similar applications where high purity and chemical stability are required. These heating elements are ideal products for the semiconductor industry and applications that require high temperature, high vacuum, and high purity.

Diameter

0.5″ – 4″

Power

150-3000W

Max. Working Temp.

2400 ℃

PBN/PG Composite Heating Element Specification

Item

Units

Values

Purity

%

99.99-99.999

Density

g/cm3

1.95-2.20

Tensile Strength

MPa

112

Bending Strength

MPa

173

Compression Strength

MPa

154

Young’s Modulus

GPa

18

Thermal Conductivity

W/m°C

“a” 60,  “c” 2

specific heat capacity

J/g·℃

0.90(RT)

Resistivity

Ω.cm

2×1015

Dielectric Constant

 

“c” 3.07

Metal Impurity Content

ppm

<10

PBN/PG Heater Advantages

-PBN composite heating element has an operating temperature of up to 1600°C.

-High mechanical durability and dimensional stability.

-High thermal shock resistance.

-PBN layer provides electrical insulation.

-Eliminate outgassing and contaminations.

-Thermal gradients can be tailored.

-Chemically inert to almost all metals, liquids, and gas.

-A large variety of PG heater and PGN heater shapes are available.

Packing

As a ceramic material, boron nitride is quite fragile in a lot of cases. Our PBN/PG heater is carefully handled to minimize damage during storage and transportation. Suitable outer boxes and inner cushioning materials are used for PBN products, vacuum packing is also engaged for some of the parts.