The LEC method uses a liquid covering agent to seal the melt and control volatile components to achieve semiconductor crystal growth.
The Pyrolytic Boron Nitride LEC crucible is mainly used as a growth vessel in liquid-enclosed Czochralski (LEC) technology, which can grow high-purity undoped semi-insulating single crystal or polycrystal suitable for direct ion implantation. PBN has a high purity( >99.99%). At 1500°C, the thermal conductivity in the a direction is more than 20 times that in the c direction, which is conducive to the formation of the temperature gradient required for single crystal growth.
Pyrolytic Boron Nitride (PBN) LEC Crucible Dimensions
Item | Inside Diameter | Height | Thickness |
PBN-L3 | 3″ | 3″ | 0.03″ |
PBN-L4 | 4″ | 4″ | 0.035″ |
PBN-L5 | 5″ | 5″ | 0.035″ |
PBN-L6 | 6″ | 6″ | 0.04″ |
PBN-L7 | 7″ | 7″ | 0.04″ |
PBN-L8 | 8″ | 8″ | 0.04″ |
PBN-L9 | 14″ | 14″ | 0.08″ |
Application
The LEC crucible is mainly used as a growth container in the liquid seal Czochralski (LEC) technology to grow single crystals.
Packing
As a ceramic material, boron nitride is quite fragile in a lot of cases. The Pyrolytic Boron Nitride (PBN) LEC crucibles are usually held in plastic bags by vacuum and protected with heavy foam.
